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Andrew R. Neureuther was a Professor Emeritus of Electrical Engineering and Computer Sciences at the University of California, Berkeley. He received his B.S., M.S., and Ph.D. degrees in Electrical Engineering from the University of Illinois at Urbana-Champaign in 1963, 1964, and 1966, respectively. Neureuther joined UC Berkeley in 1966 and was noted for his contributions to modeling and simulation in integrated circuit processing, addressing physical process effects using innovative tools to tackle emerging manufacturing issues. His work included advancements in chemically amplified imaging materials and developments in lithography, such as the simulation of optical and electron beams. A Fellow of the IEEE, Neureuther published over 250 papers and advised 35 M.S. and 30 Ph.D. students. He was elected to the National Academy of Engineering in 1995 and received several prestigious awards, including the IEEE Cledo Brunetti Award in 2003 and the Frits Zernike Award for Microlithography in 2011. He passed away in September 2025, leaving a significant legacy in the field of Electrical Engineering.
The Mathematics Subject GRE is required for the Fall 2026 admissions cycle. General GRE is optional.