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Arie den Boef is a Corporate Fellow at ASML, where he has been instrumental in developing metrology technologies for the semiconductor industry for over 20 years. He was appointed a part-time professor in metrology nanolithography at Vrije Universiteit Amsterdam in 2016. His expertise lies in metrology, alignment, and leveling systems, and he is recognized as a founding father of ASML’s YieldStar systems. Arie has been employed by ASML since 1997, receiving several accolades throughout his career including being named Fellow in 2006, Senior Fellow in 2017, and Corporate Fellow in 2023. His contributions to phase modulation alignment sensors and the YieldStar metrology system showcase his dedication to translating customer needs into innovative inventions. He holds 225 patents across 149 ASML patent families, underscoring his impact on the field and commitment to mentoring. Arie is passionate about exploring emerging trends in metrology and leveraging optical sensors to provide solutions to customers.
Administered under the Department of Clinical Psychology for Master's in Clinical and Developmental Psychopathology.