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Professor Michael Thompson received a B.S. in Applied Physics from California Institute of Technology in 1979 and M.S./Ph.D. degrees in Applied Engineering Physics from Cornell University. For the past 28 years, his research group has focused on the behavior of semiconductor materials under pulsed continuous wave laser exposure. Professor Thompson has coauthored over 120 papers and holds 20 patents. His research interests include transient thermal processing methods for characterizing and modifying material properties, particularly in semiconductor applications. His studies involve limits of liquid-phase epitaxial crystal growth in topologically complex nanopores, metastable activation and deactivation of dopant impurities in semiconductors, and mechanisms in chemically amplified photoresist systems. These studies address industrial challenges including junction formation for very large scale integration (VLSI), extreme ultraviolet (EUV) lithography, flexible electronics, and materials for novel photonic solar cells. Over 25 years, he has taught materials science engineering fundamentals to juniors, focusing on thermodynamics and developing real-life examples to motivate material understanding. He coordinates a senior thesis course covering professional responsibilities in a lab environment and has a keen interest in teaching microelectronic fabrication courses.
Department of Architecture